378_VMU

The VMU is a compact, lightweight and easy-to-install microscope unit for CCD camera monitoring in semiconductor fabrication facilities.
The VMU offers you the following benefits:

• The optical system features ultra-long working distance objectives and correction for the wide range of radiation wavelengths in use.
• Reflected illumination keeps your workpiece free from thermal expansion (the fibreoptic illuminator is required.)
• Also available with a laser mount or turret (objective mount).
• The objective is optional.