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378_VMU

The VMU is a compact, lightweight and easy-to-install microscope unit for CCD camera monitoring in semiconductor fabrication facilities.
The VMU offers you the following benefits:

  • The optical system features ultra-long working distance objectives and correction for the wide range of radiation wavelengths in use.
  • Reflected illumination keeps your workpiece free from thermal expansion (the fibreoptic illuminator is required.)
  • Also available with a laser mount or turret (objective mount).
  • The objective is optional.
378-505_z.eps
VMU-V
378-506_z.eps
VMU-H
378-513_deu.eps
VMU-LB
378-514_deu.eps
VMU-L4B